Resumen
Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, argon and ethine flow rate, were varied according to a central composite design comprising 25 different parameter combinations. For comparison, a tungsten carbide coating was deposited, as well. During coating deposition, the process variables, total pressure, sputtering voltage and bias current, were measured as process characteristics. The thickness of the deposited coatings was determined using the crater grinding method, and the deposition rate was calculated. Young?s modulus E and indentation hardness HIT" role="presentation" style="position: relative;">??ITHIT
H
IT
were characterized by means of nanoindentation. With E=80−253" role="presentation" style="position: relative;">??=80-253E=80-253
E
=
80
-
253
GPa and HIT=7.8−22.0" role="presentation" style="position: relative;">??IT=7.8-22.0HIT=7.8-22.0
H
IT
=
7.8
-
22.0
GPa, the mechanical properties were found to vary strongly in between different a-C:H:W variants. Using statistical methods, it is shown that these properties, as well as the deposition rate significantly depend on all four varied parameters. Despite a very similar influence of the parameters on modulus and hardness, as well as a very strong correlation of both properties, it is pointed out statistically that the H/E" role="presentation" style="position: relative;">??/??H/E
H
/
E
ratio, which is an indicator of the wear resistance, can be adapted in a targeted way and with some degree of independence.