Inicio  /  SCRIPTA MATERIALIA  /  Vol: 59 Núm: 9 Par: 0 (2008)  /  Artículo
ARTÍCULO
TITULO

Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films

Sharvani Nagappa    
Marc Zupan    
C.A. Zorman    

Resumen

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