Optimization of Proximity Recording Air Bearing Sliders in Magnetic Hard Disk Drives

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The continuous decrease in the size of lithographic technology nodes has led to the development of source and mask optimization (SMO) and also to the control of defocus becoming stringent in the actual lithography process. Due to multi-factor impact, def... ver m�s

Revista: Applied Sciences

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Revista: Journal of Marine Science and Engineering

Optimization of Proximity Recording Air Bearing Sliders in Magnetic Hard Disk Drives

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