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Ying-Chen Chen, Yifu Huang, Sumant Sarkar, John Gibbs and Jack Lee
In this study, a direct-grown helical-shaped tungsten-oxide-based (h-WOx) selection device is presented for emerging memory applications. The selectivity in the selection devices is from 10 to 103 with a low off-current of 0.1 to 0.01 nA. In addition, th...
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Samiran Bairagi, Kenneth Järrendahl, Fredrik Eriksson, Lars Hultman, Jens Birch and Ching-Lien Hsiao
Glancing angle deposition (GLAD) of AlN nanostructures was performed at room temperature by reactive magnetron sputtering in a mixed gas atmosphere of Ar and N2. The growth behavior of nanostructures shows strong dependence on the total working pressure ...
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Grégory Abadias, Firat Angay, Rubenson Mareus and Cédric Mastail
In this study, polycrystalline hafnium nitride (HfN) thin films were grown by oblique angle deposition (OAD) technique to investigate the relationship between column tilt angle, texture development and residual stress evolution with varying inclination a...
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