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Milton David Serna-Manrique, Daniel Escobar-Rincón, Santiago Ospina-Arroyave, Daniel Alejandro Pineda-Hernández, Yury Paola García-Gallego and Elisabeth Restrepo-Parra
In this work, thin films of TaN were synthesized on 304 steel substrates using the reactive DC sputtering technique from a tantalum target in a nitrogen/argon atmosphere. All synthesis parameters such as gas ratio, pressure, gas flow, and substrate dista...
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