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Pyeong An Lee and Bo Hyun Kim
In microbiochips and microfluidic devices, microholes are a basic and important feature. The microdrilling of glass materials without cracks is still challenging in the fabrication of glass-based microdevices. This paper investigates the characteristics ...
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Thomas Gischkat, Daniel Schachtler, Igor Stevanovic, Zoltan Balogh-Michels, Roelene Botha, Andreas Bächli, Marco Cucinelli, André Mocker, Martin Gutsche, Sven Günther, Philipp Alder and Bernd Eiermann
Substrate cleaning prior to coating has a strong influence on the performance of the optical component. Exemplary, none or inadequate cleaning reduces the resistance against laser irradiation drastically. Especially in laser components coated with anti-r...
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Robert Müller, Lilit Ghazaryan, Paul Schenk, Sabrina Wolleb, Vivek Beladiya, Felix Otto, Norbert Kaiser, Andreas Tünnermann, Torsten Fritz and Adriana Szeghalmi
High-density ruthenium (Ru) thin films were deposited using Ru(EtCp)2 (bis(ethylcyclopentadienyl)ruthenium) and oxygen by thermal atomic layer deposition (ALD) and compared to magnetron sputtered (MS) Ru coatings. The ALD Ru film growth and surface rough...
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Xuguang Jia, Ziyun Lin, Terry Chien-Jen Yang, Binesh Puthen-Veettil, Lingfeng Wu, Gavin Conibeer and Ivan Perez-Wurfl
This paper investigated the property evolutions of Mo thin films that were subjected to post-sputtering heat treatments from 700 °C to 1100 °C. It was found that, after annealing, the use of Si wafers eliminated crack formations found in previous...
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Jian Cheng, Jinghe Wang, Jing Hou, Hongxiang Wang and Lei Zhang
Laser-induced damage on fused silica optics remains a major issue that limits the promotion of energy output of large laser systems. Subsurface impurity defects inevitably introduced in the practical polishing process incur strong thermal absorption for ...
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Georg Schnurbusch, Ekkard Brinksmeier and Oltmann Riemer
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Kristin Pfeiffer, Ulrike Schulz, Andreas Tünnermann and Adriana Szeghalmi
Antireflection (AR) coatings are indispensable in numerous optical applications and are increasingly demanded on highly curved optical components. In this work, optical thin films of SiO2, Al2O3, TiO2 and Ta2O5 were prepared by atomic layer deposition (A...
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Gregory Harry, Thomas Corbitt, Marat Freytsis, David Ottaway, Nergis Mavalvala, and Steve Penn
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B. Pivac, P. Dubcek, I. Kovacevic, S. Bernstorff, R. Mu, M. Wu, A. Ueda and B. Vlahovic
Pág. 135 - 138
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Mortonson, M. J. Vassiliou, C. C. Ottaway, D. J. Shoemaker, D. H. Harry, G. M.
Pág. 4840 - 4845
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