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Songwen Deng, Gang Li, Feng Wang, Qipeng Lv, Long Sun and Yuqi Jin
Ultra-high reflectors, working as a critical optical component, has been widely applied as a cavity mirror in fine optical systems such as laser gyro, F-P interferometer, etc. For decades, ion beam sputtering (IBS) technology, which can deposit ultra-low...
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Qipeng Lv, Mingliang Huang, Shaoqian Zhang, Songwen Deng, Faquan Gong, Feng Wang, Yanwei Pan, Gang Li and Yuqi Jin
Optical coatings deposited by the dual ion beam sputtering (DIBS) method usually show high compressive stress, which results in severe wavefront deformation of optical elements. Annealing post-treatment has been widely used to control the residual stress...
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