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Inicio  /  Applied Sciences  /  Vol: 10 Par: 15 (2020)  /  Artículo
ARTÍCULO
TITULO

Inspection and Classification of Semiconductor Wafer Surface Defects Using CNN Deep Learning Networks

Jong-Chih Chien    
Ming-Tao Wu and Jiann-Der Lee    

Resumen

To detect and classify semiconductor wafer defects in order to help determine the cause(s) of the defects.

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