Resumen
Multilayer broadband antireflective (AR) coatings consisting of porous layers usually suffers poor functional durability. Based on a quarter-half-quarter multilayer structure, AR coatings with dense SiO2 film as the top layer are designed, and refractive index for each layer is optimized. After heat-treated at only 150 °C, refractive index of Nb2O5 film reaches to 2.072 (at 550 nm), which can meet design requirements of the middle layer. TiO2?SiO2 composites with controllable refractive indices are selected to be used as the bottom layer. The obtained triple-layer AR coating presents excellent performance, and the average transmittance at 400?800 nm attains 98.41%. Dense layers endow the multilayer structure good abrasion-resistance, and hexamethyldisilazane is further used to modify the surface of the AR coating, which can greatly improve the hydrophobicity of the coating. The proposed triple-layer broadband AR coating has potential value in practical applications of sol?gel deposition.