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Sami Kinnunen, Manu Lahtinen, Kai Arstila and Timo Sajavaara
Zinc oxide (ZnO) thin films were grown by atomic layer deposition using diethylzinc (DEZ) and water. In addition to depositions with normal water, heavy water (2H2O) was used in order to study the reaction mechanisms and the hydrogen incorporation at dif...
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