|
|
|
|
|
Xiaoyan Shen, Jing Yu, Jianlong Yin and Dongsheng Li
Slide stability is key to the aerostatic guide in ultra-precise machines; thus, it has garnered plenty of attention. Macro-scale studies are commonplace, but micro- and nano-vibration issues require more attention. Microscope vibration is mainly caused b...
ver más
|
|
|
|
|