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Ying-Chen Chen, Yifu Huang, Sumant Sarkar, John Gibbs and Jack Lee
In this study, a direct-grown helical-shaped tungsten-oxide-based (h-WOx) selection device is presented for emerging memory applications. The selectivity in the selection devices is from 10 to 103 with a low off-current of 0.1 to 0.01 nA. In addition, th...
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Samiran Bairagi, Kenneth Järrendahl, Fredrik Eriksson, Lars Hultman, Jens Birch and Ching-Lien Hsiao
Glancing angle deposition (GLAD) of AlN nanostructures was performed at room temperature by reactive magnetron sputtering in a mixed gas atmosphere of Ar and N2. The growth behavior of nanostructures shows strong dependence on the total working pressure ...
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Grégory Abadias, Firat Angay, Rubenson Mareus and Cédric Mastail
In this study, polycrystalline hafnium nitride (HfN) thin films were grown by oblique angle deposition (OAD) technique to investigate the relationship between column tilt angle, texture development and residual stress evolution with varying inclination a...
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Yi-Jun Jen, Wei-Chien Wang, Kai-Lun Wu and Meng-Jie Lin
Plasmonic titanium nitride (TiN) nanorod arrays (NRA) were fabricated by glancing angle deposition in a DC magnetron reactive sputtering system. The morphology of the TiN NRA was varied by collimating the vapor flux. The transmittance, reflectance, and e...
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Sadaf Bashir Khan, Hui Wu and Zhengjun Zhang
It is of great importance to develop antireflective (AR) coatings and techniques because improved optical performance has been progressively prerequisite for wide-ranging applications such as flat panel displays, optoelectronic devices or solar cells. Na...
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Yi-Jun Jen, Yueh Weng Lin, Yu-Jie Huang and Teh-Li Chan
Silver nanohelices were grown on smooth substrates using glancing angle deposition and substrate cooling. Various nanohelix arrays were deposited under different deposition conditions?different deposition rates, substrate spin rates, deposition angles, a...
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