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Baek-Ju Lee, Kyu-Beom Lee, Min-Ho Cheon, Dong-Won Seo and Jae-Wook Choi
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films are widely used as gate electrodes and electrodes in metal-oxide semiconductor ...
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Kouamé Boko Joël-Igor N?Djoré, Moussa Grafouté, Younes Makoudi, Waël Hourani and Christophe Rousselot
Tungsten oxide films are deposited onto glass and silicon substrates using reactive magnetron sputtering. Several studies have revealed difficulties in studying the electrical properties of resistive WOx films. The main objective of this work is to propo...
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Guanguang Zhang, Kuankuan Lu, Xiaochen Zhang, Weijian Yuan, Honglong Ning, Ruiqiang Tao, Xianzhe Liu, Rihui Yao and Junbiao Peng
Polyethylene oxide (PEO)-modified silicon dioxide (SiO2)-doped crystalline tungsten trioxide (WO3) films for use as electrochromic layers were prepared on indium tin oxide (ITO) glass by the sol–gel spin coating technique. The effects of the PEO te...
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