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Chao-Ching Chiang, Philip Nathaniel Immanuel, Yi-Hsiung Chiu and Song-Jeng Huang
In this work we report on a rapid, easy-to-operate, lossless, room temperature heterogeneous H2O plasma treatment process for the bonding of poly(methyl methacrylate) (PMMA) and double-sided polished (DSP) silicon substrates by for utilization in sandwic...
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