3   Artículos

 
en línea
Shui-Pin Lee     Pág. 25 - 28
The exponentially weighted moving average (EWMA) feedback controller is a very popular run-to-run (RtR) process control scheme in the semiconductor industry. Traditionally, the manufacturing environment was simplified as a single... ver más
Revista: Advances in Technology Innovation    Formato: Electrónico

 
en línea
Bing Hui, Xiuhua Fu, Des Gibson, David Child, Shigeng Song, Lewis Fleming, Guntis Rutins, Hin On Chu, Caspar Clark and Stuart Reid    
A hollow cathode plasma source has been operated automatically, demonstrating independent control of plasma ion energy and ion current density for plasma ion-assisted electron beam-deposited titania (TiO2). The lanthanum hexaboride hollow cathode design ... ver más
Revista: Coatings    Formato: Electrónico

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