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Egor Kiselev,Tetyana Krytska,Nina Stroiteleva,Konstantin Turyshev
Pág. 46 - 52
The problem of constructing a thermal sensor based on the technology of microelectromechanical systems is solved by structural and circuit integration of capacitance-dependent and thermomechanical parts. For this, the use of a MOS transistor (capacitance...
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