|
|
|
|
|
Evgeniya Ermakova, Sergey Sysoev, Irina Tsyrendorzhieva, Alexander Mareev, Olga Maslova, Vladimir Shayapov, Eugene Maksimovskiy, Irina Yushina and Marina Kosinova
We report an investigation into 1,4-Bis-N,N-(trimethylsilyl)piperazine (BTMSP) as a novel precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD). The thermal stability, temperature dependence of vapor pressure and th...
ver más
|
|
|
|
|
|
|
|
|
|
|
Hieronim Szymanowski, Katarzyna Olesko, Jacek Kowalski, Mateusz Fijalkowski, Maciej Gazicki-Lipman and Anna Sobczyk-Guzenda
In this work, optical coatings with a gradient of the refractive index are described. Its aim was to deposit, using the RF PECVD method, films of variable composition (ranging from silicon carbon-oxide to silicon carbon-nitride) for a smooth change of th...
ver más
|
|
|
|
|
|