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James B. Rosenzweig, Gerard Andonian, Ronald Agustsson, Petr M. Anisimov, Aurora Araujo, Fabio Bosco, Martina Carillo, Enrica Chiadroni, Luca Giannessi, Zhirong Huang, Atsushi Fukasawa, Dongsung Kim, Sergey Kutsaev, Gerard Lawler, Zenghai Li, Nathan Majernik, Pratik Manwani, Jared Maxson, Janwei Miao, Mauro Migliorati, Andrea Mostacci, Pietro Musumeci, Alex Murokh, Emilio Nanni, Sean O?Tool, Luigi Palumbo, River Robles, Yusuke Sakai, Evgenya I. Simakov, Madison Singleton, Bruno Spataro, Jingyi Tang, Sami Tantawi, Oliver Williams, Haoran Xu and Monika YadavaddShow full author listremoveHide full author list
Recently, considerable work has been directed at the development of an ultracompact X-ray free-electron laser (UCXFEL) based on emerging techniques in high-field cryogenic acceleration, with attendant dramatic improvements in electron beam brightness and...
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Chang-Wan Ha, Sungho Jung, Jinseong Park and Jaewon Lim
Magnetic levitation can reduce particulate contamination that occurs during wafer transportation in the semiconductor manufacturing process. This technology radically eliminates contact between the wafer and the transport system, reducing friction, wear,...
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Baek-Ju Lee, Kyu-Beom Lee, Min-Ho Cheon, Dong-Won Seo and Jae-Wook Choi
In this study, we conducted research on manufacturing molybdenum (Mo) thin films by a thermal atomic layer deposition method using solid MoO2Cl2 as a precursor. Mo thin films are widely used as gate electrodes and electrodes in metal-oxide semiconductor ...
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Zehua Liu, Xuefeng Ding, Jun Tang, Yuming Jiang and Dasha Hu
At present, many manufacturing enterprises have business systems such as MES, SPC, etc. In the manufacturing process, a large amount of data with periodic time series will be generated. How to evaluate the timeliness of periodically generated data accord...
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Philip F. Taday, Michael Pepper and Donald D. Arnone
This article contains a brief summary of areas where terahertz technology is making an impact in research and industrial applications. We cover some of its uses in the pharmaceutical setting, where both imaging and spectroscopy play important roles. Medi...
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Aji Teguh Prihatno, Ida Bagus Krishna Yoga Utama and Yeong Min Jang
High particulate matter (PM) concentrations in the cleanroom semiconductor factory have become a significant concern as they can damage electronic devices during the manufacturing process. PM can be predicted before becoming more concentrated based on it...
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Hasan Abu-Rasheed, Christian Weber, Johannes Zenkert, Mareike Dornhöfer and Madjid Fathi
In modern industrial systems, collected textual data accumulates over time, offering an important source of information for enhancing present and future industrial practices. Although many AI-based solutions have been developed in the literature for a do...
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Marvin Carl May, Alexander Albers, Marc David Fischer, Florian Mayerhofer, Louis Schäfer and Gisela Lanza
Currently, manufacturing is characterized by increasing complexity both on the technical and organizational levels. Thus, more complex and intelligent production control methods are developed in order to remain competitive and achieve operational excelle...
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BongJoo Jeong, Jun-Hee Han and Ju-Yong Lee
This study considers a scheduling problem for a flow shop with urgent jobs and limited waiting times. The urgent jobs and limited waiting times are major considerations for scheduling in semiconductor manufacturing systems. The objective function is to m...
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Freddy Del Pozo, Marta Mas-Torrent
Organic field-effect transistors based on composite materials has been manufactured using the rapid convective deposition technique. The manufacturing was carried out under environmental conditions (air, light and humidity). All manufactured transistors ...
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